KU SG 1000-50 W is a power microwave generator suitable for plasma generation or ion implantation. Power and frequency are configured to 50 W at 10 GHz. All peripheral components; such as switching power supplies; cooling; shutdown mechanisms for operational safety and an isolator; are already implemented into a 19" rack. The generator has a waveguide output following the WR-90 standard and can be connected to every standard 230 V AC power supply. The control can be done manually via the front panel as well as via the LAN interface. Here; a virtual COM port is provided for communication and the user can read operating parameter and switch the generator on and off.
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